Superconductive thin films of Y-Ba-Cu-O have been grown in situ by r.f. magnetron sputtering from a single stoichiometric target on Al2O3 substrates. Zero-resistivity temperatures as high as 73 K have been achieved. X-ray and EDS analyses have been performed on the samples. The dependence of film features on deposition conditions is also discussed.
In situ superconducting YBaCuO thin films by single target r.f. target magnetron sputtering
TAFURI, Francesco
1991
Abstract
Superconductive thin films of Y-Ba-Cu-O have been grown in situ by r.f. magnetron sputtering from a single stoichiometric target on Al2O3 substrates. Zero-resistivity temperatures as high as 73 K have been achieved. X-ray and EDS analyses have been performed on the samples. The dependence of film features on deposition conditions is also discussed.File in questo prodotto:
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